Vaisesika Sūtra 7.1.22

विभावान्महानाकाशस्तथा चात्मा ॥२२॥

vibhāvān-mahān-ākāśas-tathā ca ātmā ॥22॥

[विभावात् (vibhāvāt) - from manifestation; महान् (mahān) - the great; आकाशः (ākāśaḥ) - ether; तथा (tathā) - likewise; च (ca) - and; आत्मा (ātmā) - self;]

From manifestation arise the great, ether, and likewise the Ātmān.